Process Carriers

Excellent batch wet benches are not good enough. They must be complemented by high performance process carriers. RENA has complemented its product range for almost 10 years with high performance carrier design, manufacturing and application; the RENA range of carriers offers two designs in two materials complements, customized solutions can be supplied on request.


Features and Benefits

    • Open construction with unique tooth design reduces wafer masking and allows maximum solution flow
    • In combination with astec batch wet benches integrated floating prevention for wafers and carriers
    • Some design features patented

ARENA

DYCONEX successfully running 25 μm laminates using RENA cleaning unit

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Imec, RENA and SoLayTec present innovative ALD passivation

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PARTNER

CONTACT

Solar Carrier
@: Anne Chasse