Measuring & classification
Bath analysis
Maximum quality standards in all wet process steps are assured through permanent monitoring of process baths.

Properties and benefits:

• Complete process monitoring
• Process development and production support
• Online/offline bath analysis

• Online/offline titration
  
  
  

Measuring & characterisation
Devices for characterising wafer thickness, etching rates, surface roughness, damage, and other criteria can be integrated in RENA equipment for quality assurance and monitoring of material flow during wet process steps.

Properties and benefits:

• In-line metrology
• Surface characterisation, e.g. roughness
• Advanced measurement tools (300 mm)
• Thickness measurement
• Warp and bow detection
• Customised solutions