Automation solutions

Adapted handling systems for best results and maximun productivity.

Wafer handling and transport
Specially adapted automation and transfer system to ensure safe handling of the silicon wafers.

Properties and benefits:

  • Carrierless handling 
  • Fully or partially automated equipment
  • High variability through modular design
  • Standard and rapid transfer times < 1 sec
  • Customer-specific wafer pitch
  • Customer-specific batch sizes

 

 

ARENA

DYCONEX successfully running 25 μm laminates using RENA cleaning unit

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Imec, RENA and SoLayTec present innovative ALD passivation

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PARTNER

CONTACT

SEMICONDUCTORS
@: Frank Schienle