Drying technologies of the latest generation for high throughput.

Drying
Drying technologies for all silicon wafer cleaning requirements.

Properties and benefits:

• Carrierless Transport
• All drying processes from a single source according to equipment design
     Marangoni ® drying
     HF /O3 drying
     Hot water drying
     Single wafer spin rinse dryer
     Carrier spin rinse dryer
• Short drying times
• Residue-free drying