Residue-free stripping of ultra fine and high aspect ratio structures. To lower the cost of ownership for resist strippers it is important to remove very fast the stripped resist structures out of the chemistry circulation so that no additional reaction with the stripped resist takes place. Our integrated collection unit is the state of the art solution for strip systems.

Features and Benefits - Resist Strip

• Primary inline filtration with sloped, vibrating mesh unit
• Primary filtration on equipment back side
• Collection unit with two separated baskets to assure dry resist

Features and Benefits -Tin Strip

• Optimal treatment of high aspect ratio holes
• High impingement spray-flood bars with 34 nozzles
• Inline filtration with quick release 80 µm mesh filters with safety switch