Measuring, checking, sorting - the RENA QCheck performs the classification of all wafers and cells. The modular system allows integration of various measuring systems. The subsequent sorter module can be laid out at will.

Features and Benefits

• Modular design for individual configuration with measuring systems: Thickness, TTV, bow, resistivity, lifetime, surface inspection, topology and geometry, multicrystallinity and micro crack detection
• Aribitrary number of buffering classification stacks
• Integration of customer defined measuring systems or industry standard measuring systems
• Throughput 3600 wafer/h netto