The RENA VarioLoad is designed for loading PV processing systems. The modular design can load from stacks, carrier or a single-lane upstream process to a downstream multi-lane process.

Features and Benefits

• Optimised compatibility to all RENA tools
• Modular design for individual configuration (Distribution system, Stack Splitter, Stack Loader, Stack Buffer, Carrier Buffer, Breakage discharge)
• High throughput thanks to continuous wafer transport
• Breakage rate < 0,1% 
• Throughput 3600 wafers/h (depending on module combination)
• Uptime > 98%