The new design of the RENA PreWaClean guarantees proven cleaning results, minimised water consumption and an outstanding throughput.

Features and Benefits

• System prepared for the future generation of saws
• Wafer basket:
  - Total access to the block during first cleaning step
  - Wafers are fixed after unglueing process
• Maximum loading length 1.080 mm per run
  - Loading length 820 mm also available
• Highest throughput, 4 runs per hour by minimal footprint
• During cleaning process no remove of the beam connecting plate necessary
• Solutions for the whole process chain from saw to end of wafer cleaning
• Integrated ultrasonic step
• different recipies with free programmable process steps
• RENA cleaning process know-how
• Cleaning support by detergent concentration