A wet ribbon separates the wafers direct out from a pre-cleaning wafer basket. A breakage detection sorts out broken wafers. The integrated distribution allocates the wafers onto four and more lanes.

Features and Benefits

• Direct separation out of the RENA PreWaClean wafer basket, timesaving and gentle process
• Wafer separation with water jet system
• Removal of wafer breakage and thick wafers
• Equipped for the separation of 156 mm wafers (standard design)
  Optional: conversion kit for 125 mm wafers
• Integrated distribution system allocates the wafers onto four lanes
  Optional: More lanes