Metallisation Cluster High Efficiency
Simultaneous SiN ablation and phosphorous doping by a water jet guided laser in the SelectDop LCP – followed by a plating process on the RENA InCellPlate or CupCellPlate generate the next generation front side metallisation.
Features and Benefits
- Perfect automation integration
- Defined mechanical and data handshakes
- Ideal workflow integration - Technological leadership
- Process integration of laser processing and plating
- Process start up by RENA
- Low total cost of ownership
- Efficiency increase up to 1%
