Selective emitter forming is an important step to push industrial solar cell production to a high efficiency level. An automated Laser Chemical doping system SelectDop LCP is now available which uses an array of fine and precise liquid jets to guide laser beams for local phosphorus diffusion (20 Ohm/sq) and a damage free SiNx ablation. This process is followed by a self aligned plating process from RENA with Ni as contact forming material or can be followed by standard screen printing.

Features and Benefits

• High volume production tool for laser chemical processing
• Liquid jet guided laser beams for local diffusion processes
• SiNx ablation without thermal damage
• Production of high efficiency solar cells
• Up to 1% efficiency increase (depending on emitter sheet resistance)