The InOxSide ensures efficient junction isolation and PSG removal for high throughput solar cell production. With the additional emitter etch back step, the EB series offers an extra boost in blue response and improves cell efficiency as well as process reliability.

Features and Benefits

• PSG removal, junction isolation and emitter etch back in one single tool
  - Optimised footprint
  - Ideal process and work flow integration
• Technological leadership
  - Advanced process integration with the RENA InDop system offers a further efficiency increase and raises the performance of inline diffusion to the level of POCI₃
  - Process start up by RENA