The InOxSide® EB ensures efficient junction isolation and PSG removal for high throughput solar cell production. With the additional emitter etch back step, the InOxSide® EB offers an extra boost in blue response and improves cell efficiency as well as process reliability.

Features and Benefits

• PSG removal, junction isolation and emitter etch back in one single tool
  - Straight line and optimised footprint
  - Ideal process and work flow integration
• Advanced process integration with the RENA InDop system offers a further efficiency increase and raises the performance of inline diffusion to the level of POCI₃
• Process start up by RENA
• Minimum total cost of ownership
• Stable and reproducible processing