The InPolish system smoothens one side of the wafer using a polishing etch in an inline single side process. Thus it provides the smooth surface required for high- efficiency concepts like rear-side passivated cells, improves the back side reflection and allows for an efficient passivation of the rear surface. Together with the InOxSide® tools, it completes RENA’s toolbox for rear-side passivated cells.

Features and Benefits

• Enables processing schemes for rear-side passivated cells
• Inline single side process:
  - Straight line footprint
  - Ideal process and work flow integration
• Suitable for both multi- and monocrystalline cells
• Process start up by RENA
• Etch depth and polishing grade tunable to the cell requirements