RENA Technologies GmbH
Höhenweg 1
D-78148 Gütenbach
Tel. +49 7723 9313-0
E-Mail info@rena.com

RENA

Batch S Platform

Wet bench for semiconductor manufacturing and other applications

Modular & Customised

Areas of application

  • Semiconductor, MEMS, LED, OLED, Optoelectronics, Plastic Electronics, Medical
  • All wet process applications in FEOL and BEOL

Features and benefits

  • High process flexibility and process analysis by freely configurable software
  • Advanced scheduling and throughput simulation
  • Standard and highly customised systems
  • All kinds of substrates from 4” up to 12”
  • Handling system for standard carrier, low mass carrier and carrierless
  • Flexible input / output
  • The modular design facilitates minor modifications just as well as serious customisation
  • Minimized footprint and quick start up by power and control cabinets integrated into the system body
  • System sectioned to minimize installation effort and to allow shipping by air or sea freight
  • Manufactured according to SEMI standards
  • Clean room class up to ISO class 3
  • Easy maintenance integral part of design

Technical Data Batch S Platform

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Contact person

Bernard Winker
Bernard Winker
Customised Equipment
Phone
+49 7723 9313-438
E-Mail
bernard.winker@rena.com
@ RENA
RENA Technologies GmbH | Höhenweg 1 | D-78148 Gütenbach | Tel. +49 7723 9313-0 | info@rena.com