As a global leader when it comes to innovation and technology in the wet chemical surface treatment solution, RENA drives the development of process automation for wafer and chip manufacturing. Its products range from standard series up to high-throughput production with a process guarantee for reliable systems and processes that meet specific customer requirements. The systems are available as fully automated wet benches, semi-automated wet benches, and manual wet benches as well.
Manual and automatic wet benches for batch production
RENA’s manual and automatic wet benches handle all wet processes in front-end-of-line (FEOL) and back-end-of-line (BEOL) batch production. They meet the high expectations placed on their production requirements by producers of CMOSs, MEMS, OLEDs, LEDs, and Optoelectronics.
The sophisticated, modular design of RENA wet benches boasts small foot-print, allows for fast start-up and hook-up, process-specific adjustments to optimize ongoing production.