Batch Spray

The wet processing systems of the platform spray batch for acids and solvents technology is based on a closed one chamber system. The spray batch systems are used in all areas of the Semiconductor industry. Easy configurable to your needs at the smallest footprint.

There are many advantageous features for process control and monitoring in the IDX Flexware software.

All RENA systems are available and compliant to the SECS/GEM interface of factory host.

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Phone : +49 7723 9313-0