Solano I

The Solano I is a cleaning system for up to 200mm application for all common types of cassettes and boxes as well as SMIF-Pods. It operates semi-automatic and supports your contamination control. A permanently rotating carousel in combination with an optimized Hot-DIW spray cleaning system achieves perfect cleaning results. If desired it is possible to add a surfactants (cleaning detergent). A fast centrifugal force power and high quality hot air supply with HEPA filter-unit are taking care about integrated drying. Regular cleaning of your carriers enables an efficient reduction of particle and metal contaminations inside and out of your products.

Features and benefits

  • Up to 99 recipes, each with 20 cleaning steps
  • Variable data input (time, temperature, speed,
    parameter, etc.)
  • Hot air dryer with humidity sensor
  • Fan-unit with adjustable speed for standby
    and process mode
  • Unbalanced sensor for automatic shut off
  • Front side operation
  • Illuminated process chamber


  • Easy installation due to modular design
  • Fast installation, hook-up and start-up
  • Minimum maintenance & consumable costs
  • Excellent cleaning & drying performance
  • Low water consumption
  • Simple operation of the tool
  • One operator can run 3-4 systems
  • Low cost of ownership



  • Housing according FM4910
  • SECS II GEM Interface
  • RFID or barcode reading
Sales Director Semiconductor
Oliver Pohl
ResponsibleResponsible for the following countries: