Solano II

The Solano is an semi-automatic cleaning system, for your support of contamination control on all common types of FOUP´s and FOSB´s. An optimized Hot-DIW spray cleaning system supported through the permanently rotating of the carousel achieve best cleaning results. If desired by adding a surfactants (cleaning detergent), optionally. Drying via an fast centrifugal force power and high quality hot air supplying through an integrated HEPA filter-unit. Regular cleaning enables an efficient reduction of particle and metal contaminations on and inside your products.

Features and benefits

  • Up to 99 recipes, each with 20 cleaning steps
  • Variable data input (time, temperature, speed,
    parameter, etc.)
  • Hot air dryer with humidity sensor
  • Fan-unit with adjustable speed for standby
    and process mode
  • Unbalanced sensor for automatic shut off
  • Front side operation
  • Illuminated process chamber


  • Easy installation due to modular design
  • Fast installation, hook-up and start-up
  • Minimum maintenance & consumable costs
  • Excellent cleaning & drying performance
  • Low water consumption
  • Simple operation of the tool
  • One operator can run 3-4 systems
  • Low cost of ownership



  • Housing according FM4910
  • SECS II GEM Interface
  • RFID or barcode reading
Sales Director Semiconductor
Oliver Pohl
ResponsibleResponsible for the following countries: