Texturing and cleaning of silicon wafers for silicon heterojunction (SHJ) application requires adapted etching and advanced surface processing. Compared to processing of PERC solar cells, adjusted processing with regards to etching and cleaning is needed to account for the high demands of surface passivation using heterojunction layers. The high level of sensitivity of the surface prior to amorphous silicon deposition calls for high quality wet chemical texturing, cleaning and drying.
For mass production of high efficiency silicon solar cells with heterojunction structure RENA provides the perfect solution with the BatchTex SHJ. Wet chemical texturization and advanced cleaning requirements before passivation layer deposition can be fulfilled and adjusted. The solution is based on RENA’s Batch N platform which allows the integration of all batch-type wet chemical processes into a start-of-the-art high throughput production platform for crystalline silicon solar cell manufacturing.