Applications for solvent cleaning, resist strip and developing processes are performed highly efficiently including rinsing and drying. RENA spray batch system is designed for solvents. Different types of solvent can be combined in one chamber; this offers great potential for efficiency and process optimization. No direct contact to solvents by operator, this makes the process safe.
- Reduced medium consumption
- Optimized footprint
- Single or dual cassette handling
- Highly serviceable, easy access
- SECS/GEM Interface Options
- Flexible and Upgradeable
- Improved operator user safety