European CMP & WET Users Group – Spring Meeting: Successful Kick-Off in Leuven

CMP (Chemical Mechanical Polishing) and WET (Wet Polishing) are key technologies in the manufacturing of semiconductor devices and MEMS. While they may seem straightforward, they require deep technical expertise and an experimental approach to process development.

The European CMP and WET Users Group serves as an open platform for professionals from industry and academia to share knowledge, network, and collaborate – a technical home for everyone working with these essential technologies.

At this year’s Spring Meeting in Leuven, participants had the opportunity to attend inspiring presentations and establish valuable connections with leading experts in the field. They also explored innovative, automated solutions for wet processing in semiconductor manufacturing and engaged in meaningful exchanges with key industry players.

We were proud to present our latest innovation: the compact wet processing system RENA Revolution+.

This compact, automated wet bench for multi-step processes, known as Revolution+, was specifically developed for complex, multi-step semiconductor workflows. It combines flexibility and automation in a space-saving design: A central rotary robot precisely transfers wafers between up to three process and three rinsing tanks. Thanks to the integrated drying unit, the system offers a seamless process chain – enabling maximum productivity and process reliability in a compact footprint. Patented tanks also support advanced applications such as metal etching and metal lift-off. Optionally, the Revolution+ can be equipped with the Genesis Marangoni Dryer for defect-free wafer drying.

The European CMP & WET Users Group – Spring Meeting was not just an industry gathering – it was a glimpse into the future of semiconductor manufacturing. We sincerely thank all participants for the valuable exchange and look forward to future meetings.

» Click here to get to our semicondutor solutions

» Are you interested in our wet chemical systems? Please contact our sales team.