RENA’s Flexview Advanced Process Monitoring Software enables equipment and process engineers to review the processing conditions of a specific lot ID at a glance.

FlexView software does this by providing a graphic representation of all existing monitored conditions & tolerances, then storing that data in a file that is specific to the Lot ID that was being processed at that time. In the event of a yield loss on a particular lot, the process engineer can quickly identify if the wet station processed that lot within the required specifications. In this way, the system can be much more easily eliminated as a possible cause of the yield loss even. FlexView eliminates the need to interpret large amounts of data in the data log. This creates the opportunity for greater system optimization and process transparency while improving the overall operator experience.