Processing of glass substrates

Glass wafers are commonly used in a microfabrication process! RENA provides the Revolution platform for cleaning, etching and stripping processes for glass wafers. Check out the benefits:

• Multi-Step Sequences
• Acid & Solvent Solutions
• Up to 5 Processing Tanks
• 100-200mm wafers
• Small footprint

RENA offers the optimal solution for the fields of optics, microfluidics and sensors.
Check out our new section on the website:
https://www.rena.com/en/products/glass-sapphire/glass-wafer-processing/