Wafers made of glass, are the basis of the modern micro system technology. Glass has many advantages as a material such as high chemical and heat resistance, high electrical isolation, biocompatibility, large optical transition range as well as low optical absorption. Due to these properties glass wafers are widely used in conventional microfabrication processes.
Microfabrication process allows creation of diverse structures in a glass wafer. To achieve good quality in a structuring process, initial cleaning process is of crucial importance. RENA offers diverse cleaning procedures in a batch adapted to needs of customer, degree and type of contamination, glass type and corresponding following application.
Process steps such as chrome etching can be integrated in a process sequence for structuring of chrome layer. RENA offers also equipment for etching of commonly used metals in a fabrication process such as gold and nickel. Depending on the customer needed RENA tools can also contain baths for glass etching and resist stripping.
The number of processes can be freely adjusted to the required throughout and specific customer needs.
- Glass cleaning
- Glass etching
- Metal etching / Chrome etching
- Resist stripping
For many complex applications, it is the most ideal, low-cost solution for processes that require a multistep sequence. Our Revolution Wet Processing System is a highly configurable multi-step wet bench. It can be configured for either semi-auto or full-auto applications. Our Revolution Wet Processing System offers up to 5 processing tanks located around its central rotary robot and also provides field-proven, dry-to-dry Genesis technology. As with all RENA equipment, the platform footprint is always a priority and kept minimal.
- Multi-Step Sequences
- Acid & Solvent Solutions
- Up to 5 Processing Tanks
- 100-200mm wafers
- Small footprint
Looking at The Revolution Wet Processing System with its robust integrated rotary robot, customizable process tank configurations, and unique options we create a powerful, versatile tool system that provides a reliable solution to every challenge.
Thousands of micro-optics components can be fabricated in parallel on a glass wafer using microfabrication process. Optical components such as lenses, mirrors, beam splitters and gratings can mostly be used in photonics, the semiconductor industry or the medical field. Refractive and diffractive micro-optical elements are used for precise beam shaping. Micro-optics also plays an important role in medical devices such as endoscopes as well in laser-based devices and fiber communication networks.
Many microfluidic devices are fabricated out of glass with microfabrication process. Microfluidic devices have become essential elements for biomedical instrumentation for diagnostics. Being transparent under a wide wavelength range, glass is a first candidate for microbioanalytical devices such as microcapillary electrophoresis or devices for cell trapping or sorting. Microfluidic chips with sophisticated channel structure find their applications in devices for point of need testing (PON), flow cells for single molecule handling of DNA for next generation sequencing (NGS).
The technology for the microfabrication of glass is gaining in importance because more and more glass substrates are currently being used to fabricate MEMS devices. It is today already implemented as a mature solution such as pressure and acceleration sensors. Patterned wafers with cavities which can be obtained through etching are used to encapsulate the pressure sensor die. The encapsulation is done by using a wafer level packaging (WLP) approach.
Advanced cleaning solutions
- For highest performance and challenging environments in the Glass, MedTech, Pharma and Semiconductor industries
- Water- and solvent-based
- Cleanroom, ATEX, GMP
Looking back at over 20 years of expertise in cleaning applications for various substrates, RENA offers advanced glass cleaning solutions for diverse industries and challenging environments.
Our Batch tools deliver highest performance for the Glass, MedTech, Pharma, Advanced Optics and Semiconductor sectors. They fulfill cleanroom, ATEX and GMP requirements and are designed for water as well as organic solvent based processes.