RENA Genesis Marangoni Dryer integrates drying with cleaning and rinsing, providing a one-step process. The wafer drying with RENA Genesis Marangoni Dryer utilizes a proprietary design with wafer lifter and integrated tilt to ensure the face of the wafer is not contacting the Teflon cassette during the dry cycle. The tilt feature also minimizes contact on the back side of the wafer. Genesis Marangoni Dryers are compatible with Bare Si, SiO₂, GaAs, Ge, Sapphire as well as Glass wafers. The entire process is monitored and controlled by RENA’s exclusive IDX Process Control software.
Improve yield, reduce particles RENA’s Marangoni Dryer provides superior performance