ISODry – IPA only

RENA ISODry can be integrated into RENA solvent immersion platforms. The entire process is monitored and controlled by RENA’s exclusive IDX Process Control software.

Features and Benefits

  • Lowers cost for integrated dry
  • Maintains POR for users with Single wafer IPA drying
  • Wafer lifter ensures minimal contact area
  • Integrated hot N2 produced by heat exchanger for lower energy cost
  • Continuous IPA Recirculation
  • Reduced IPA usage compared to other typical Vapor or vacuum dryers
  • Lower Exhaust Requirements
  • IPA use per wafer is similar to other Marangoni dryers
  • Advanced software control capabilities with IDX Flexware
  • Particle performance < 20 at 150 nm
VP Sales
Theo Moissidis
ResponsibleResponsible for the following countries: