Successful Participation at the European CMP & WET Users Group Spring Meeting

The European CMP & WET Users Group Spring Meeting 2026 in Halle once again provided an excellent platform for in-depth technical exchange within the semiconductor industry. Experts, users, and technology providers came together to discuss current challenges, innovative technologies, and future developments in CMP, wet processing, and wet chemical processing.

The focus was particularly on compound semiconductors such as silicon carbide (SiC), gallium nitride (GaN), and indium phosphide (InP), which play a key role in many future applications. With their increasing adoption, the demands on stable, efficient, and flexible wet processes and wet chemical equipment across the entire process chain are also growing.

A central topic of discussion was how to combine highest process quality with cost-efficiency and flexibility - from etching and cleaning processes to advanced drying solutions in wet processing.

In this context, RENA Technologies presented innovative approaches for modern wet processing and wet chemical equipment. The focus was on the Revolution+ platform, which combines batch processing with automated wafer handling and can be flexibly adapted to different requirements. Its modular concept enables efficient integration of various process steps while reducing footprint and optimizing resource usage.

Especially for research environments and pilot lines, the platform provides a reliable basis for reproducible processes in areas such as photonics, RF technologies, and power electronics.

In addition, visitors gained insights into RENA’s ACE process, which opens up new possibilities in the chemical etching of SiC and demonstrates innovative approaches for processing demanding materials within advanced wet chemical systems.

The event offered numerous opportunities for personal exchange and discussions on current trends and future developments. RENA Technolgies looks back on a successful participation and would like to thank all visitors for the many engaging conversations in Halle.

» Explore the RENA Technologies wet processing equipment