The wet processing systems of the platform "Advancer" are robust, field-proven single-step solutions. Easy configurable, one process and one rinse tank with a sidewall linear robot application. All semiconductor processes are integrable and the state of the art. The Advancer footprint is kept minimal and extremely maintenance-friendly. There are many advantageous features for process control and monitoring in the IDX Flexware software. All RENA systems are available and compliant to the SECS/GEM interface of factory host.
Three “Advancer” systems are available, Gemini, Classic and Micro.