Large Format Hot Alkaline Glass Etch - BatchGlass LF HTX

The BatchGlass LF HTX is a semi-automated wet processing tool for large size glass substrates. Within the batch processes panels of up to 600 x 600 mm can be etched, cleaned and dryed. The sophisticated hot alkaline etching process assures highest performance for selective and controlled etching. This is crucial for combined laser and etching applications like through glass vias (TGV) used in semiconductors and micro LED displays.

Features and benefits

  • Processing of large format panels up to 600 x 600 mm
  • Advanced hot alkaline technology for selective and controlled etching
  • Combined laser and etching technology
  • Low taper angles and excellent homogeneity of etching
  • Highest surface cleanliness and quality
  • 24/7 operation and easy upscaling of process
  • Highest homogeneity standards for hot alkaline etching
  • Optimized footprint and compact design

Product Video

Technical Sales Manager
Felix Fink
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