Large Format Hot Alkaline Glass Etch - BatchGlass LF HTX
The BatchGlass LF HTX is a semi-automated wet processing tool for large size glass substrates. Within the batch processes panels of up to 600 x 600 mm can be etched, cleaned and dryed. The sophisticated hot alkaline etching process assures highest performance for selective and controlled etching. This is crucial for combined laser and etching applications like through glass vias (TGV) used in semiconductors and micro LED displays.