Evolution - fully automated, dry-to-dry semiconductor manufacturing wet bench

The wet processing system "Evolution" is a fully automatic linear semiconductor wet bench. The modular structure is very flexible and can be easily configured according to your process sequences.

The Evolution's main feature is high yield, while maintaining a low cost of operation. The full-auto design features dry-in and dry-out processing with multiple, simultaneous lots batch processing.
The advantageous of the "Evolution" controlling is the IDX Flexware software and one of the most advanced wet processing systems in these industry.
Unique, advanced features and capabilities, including lot scheduling via the "Scheduler" from RENA, FlexView (optional).
Multi-step processing in specialized process tanks, like Ultrasonic and Megasonic tanks, cascades or quick dump rinsing tanks, chemical dosing and monitoring (optional), multiple RENA´s drying solutions specified to your product, like Genesis Marangoni drying. A robust and reliable transfer robot.
All RENA systems are available and compliant to the SECS/GEM interface of factory host.
The Evolution is customized to your specific process requirements.

Features and Benefits

  • Full-Auto, Dry-to-Dry operation
  • 100mm up to 200mm wafer sizes
  • 25, 50 and 100 wafer lots
  • IDX Flexware Control Software
    • Simultaneous Lots & Recipes
    • Advanced Process Monitoring
  • Integrated HMI Touchscreen
  • SECS/GEM Interface Options
  • Class 1 mini-environment
  • Stainless-steel version for Solvent application
  • Flexible and Upgradeable
  • Tailored to Customer Specification
  • Increased Uptime & Throughput
  • Extended Chemistry & Tank Life
  • Reduced Chemical & DI Water Usage
  • Lower Facility Costs
Sales Director Semiconductor
Oliver Pohl
ResponsibleResponsible for the following countries: